HiPace ® 10-800:
Robust design of compact ball bearing or composite bearing turbomolecular pump with pumping speed of 10-800 L / S
Minimum space installation requirements
high reliability
HiPace ® 1200-2300:
High pumping speed of compact composite bearing turbomolecular pump with pumping speed grade of 1000 ・ 2000 L / S
Greater air flow
Faster startup time
HiPace ® 300-800 M, ATH 500 M:
The compact magnetic levitation turbomolecular pump with a pumping speed of 300.800 L / s has greater air flow, lower operating vibration and lower energy consumption
ATH 1600-3200 M:
The compact magnetic levitation turbomolecular pump with pumping speed of 1400-2800 ^ / s has better compatibility with the front stage pump
Extremely high air flow
The turbomolecular pump family has a full range of products ranging from pumping speed of 10 ・ 2700 L / s.
They all have high cost performance and flexible installation methods
The practical bearing system provides more optimized reliability
Mature and exquisite rotor design makes it have absolutely excellent extraction speed
Better front stage pump compatibility and greater air flow
It has a higher compression ratio for small molecular gases.
